Piezoresistive position sensor systems
US10408695B2 · kind B2 · utility
0Cited by
6References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 25, 2017 |
| Grant date | Sep 10, 2019 |
| Priority date | — |
| Expiry date | Sep 21, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0833
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This disclosure relates to systems that include a substrate and a platform connected to the substrate by at least one flexure hinge. The platform is movable relative to the substrate. The systems also include at least one position sensor having a plurality of piezoresistive elements that are connected to one another so as to form an electrical bridge. One of the piezoresistive elements of the plurality of piezoresistive elements is positioned on the at least one flexure hinge. At least one other piezoresistive element of the plurality of piezoresistive elements is positioned on at least one of the substrate and the platform.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.