Inspection device and inspection system
US10408766B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 26, 2016 |
| Grant date | Sep 10, 2019 |
| Priority date | — |
| Expiry date | Jan 26, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8848
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection device includes an illumination unit for illuminating a subject having a bright part and a dark part darker than the bright part, a light path dividing unit for dividing object light from the subject illuminated by the illumination unit into first light and second light that pass through different light paths, a filter for reducing the amount of the first light having passed through the light path dividing unit, a first imaging unit in which the first light having passed through the filter forms an image, a second imaging unit in which the second light having passed through the light path dividing unit forms an image, and an inspection unit for inspecting whether a defect is present in the subject based on information of the bright part taken by the first imaging unit and information of the dark part taken by the second imaging unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.