Apparatus and method for plasma treatment of containers
US10410838B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 6, 2010 |
| Grant date | Sep 10, 2019 |
| Priority date | — |
| Expiry date | Mar 10, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05D2202/25
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus (9) for plasma treating multiple containers. The apparatus includes a manifold (2) comprising at least a first chamber with multiple outlet openings and multiple hollow, electrically-conductive nozzles (10) for at least one of delivering or exhausting plasma-generating gas. The multiple hollow, electrically-conductive nozzles are connected to the multiple outlet openings and protrude from the manifold. A method of plasma treating multiple containers is also disclosed. The method includes providing a reactor system comprising an apparatus disclosed herein, inserting the multiple hollow, electrically-conductive nozzles into the multiple containers (30), evacuating the multiple containers, grounding the multiple hollow, electrically-conductive nozzles while applying radio frequency power to the multiple containers, providing a gas inside the containers, and generating a plasma. At least one of evacuating or providing the gas is carried out through the hollow, electrically-conductive nozzles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.