Method for manufacturing a device comprising a hermetically sealed vacuum housing and getter
US10414647B2 · kind B2 · utility
1Cited by
3References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 21, 2018 |
| Grant date | Sep 17, 2019 |
| Priority date | — |
| Expiry date | Mar 21, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/48091
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A device having a microelectronic component housed in a hermetically sealed housing having a vacuum inner space, and including a getter that substantially traps only hydrogen, is inert to oxygen and/or to nitrogen, and is housed in said inner space. Each of the constituent parts of the device being likely to degas into the inner space is a mineral material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.