Electronic component transport apparatus and electronic component inspection apparatus
US10416231B2 · kind B2 · utility
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14Claims
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Assignee
Inventors
Key dates
| Filing date | Feb 3, 2016 |
| Grant date | Sep 17, 2019 |
| Priority date | — |
| Expiry date | Feb 3, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67389
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electronic component transport apparatus includes: an openable and closable first opening and closing portion; a first rotation support portion which supports the first opening and closing portion to be rotatable; a second opening and closing portion provided to be openable and closable in the first opening and closing portion; and a second rotation support portion which supports the second opening and closing portion to be rotatable. An area of the first opening and closing portion is greater than an area of the second opening and closing portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.