Suspended photonic waveguides with top side sealing
US10416380B1 · kind B1 · utility
12Cited by
9References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 23, 2017 |
| Grant date | Sep 17, 2019 |
| Priority date | — |
| Expiry date | Jun 23, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12197
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Techniques for forming a photonic device that includes a suspended photonic structure suspended over a silicon substrate are described. A sealed cavity is positioned between the silicon substrate and the photonic structure, and one or more regions of dielectric material act to seal the cavity. Additional structure(s) may be formed on top of the dielectric material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.