Systems and methods for improved focus tracking using a light source configuration
US10416428B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 6, 2018 |
| Grant date | Sep 17, 2019 |
| Priority date | — |
| Expiry date | Mar 6, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/36
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An imaging system including a light source; a first focusing lens positioned to focus a beam from the light source to a beam waist at a predetermined location along an optical path of the beam in the imaging system; a beam splitter positioned relative to the first focusing lens to receive the beam from the first focusing lens and to create first and second beams; a second focusing lens positioned to receive the first and second beams output by the beam splitter, to focus the received first and second beams to a spot sized dimensioned to fall within a sample to be image, and further positioned to receive first and second beams reflected from the sample; an image sensor positioned to receive the light beams reflected from the sample; and a roof prism positioned in the optical path between the second focusing lens and the image sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.