Optical imaging arrangement with a piezoelectric device

US10416570B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Jens Kugler · Heubach, DE
• Stefan Hembacher · Bobingen, DE
• Michaela Schmid · Kaltenbach, CH
• Bernhard Geuppert · Lauchheim, DE
• Burkhard Corves · Zug, CH
• Martin Riedel · Leverkusen, DE
• Martin Wahle · Munich, DE
• Mathias Huesing · Aachen, DE
• Michael Lorenz · Salzburg, AT
• Tim Detert · Aachen, DE
• Marwene Nefzi · Ulm, DE

Key dates

• Filing date: Nov 29, 2018
• Grant date: Sep 17, 2019
• Expiry date: Nov 29, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70825
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical imaging arrangement includes an optical element unit, and an actuator device connected to the optical element unit and is configured to be connected to a support structure for supporting the optical unit. The actuator device is configured to: actively adjust, in an adjustment state, a position and/or an orientation of the optical unit with respect to the support structure in N degrees of freedom; and support the optical element unit in a statically overdetermined manner in at least one of the N degrees of freedom via a plurality of active first and second actuator components such that, in a holding state following the adjustment state, the first and second actuator components cause a parasitic residual load introduced into the optical element unit in the at least one of the N degrees of freedom.