Patent · US Active

Method and device for cleaving wafers

US10421208B2 · kind B2 · utility

0Cited by
0References
24Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 12, 2013
Grant dateSep 24, 2019
Priority date
Expiry dateDec 23, 2033

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T225/12
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

A method for cleaving wafers comprising the following steps: providing a slice of a crystalline material with at least a first plane side, providing at least one stressing means to be attached to said slice, wherein said at least one stressing means is at least in parts made of a material with a coefficient of thermal expansion different from that of the slice, attaching said stressing means to said first plane side of said slice to form a stack, inducing a thermal shear stress to said slice by applying a temperature change to said stack.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.