Apparatus for curing thin films on a moving substrate
US10422578B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 21, 2017 |
| Grant date | Sep 24, 2019 |
| Priority date | — |
| Expiry date | Mar 13, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01B7/423
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
An apparatus for curing thin films is disclosed. The apparatus includes a computer control system, a conveyance system, a flashlamp controller, and a flashlamp. The curing apparatus also includes a high average power, low-inductance cable connected between the flashlamp controller and the flashlamp. The low-inductance cable is smaller in diameter and is more flexible than the prior art and includes at least one liquid cooling line and multiple forward and return path wires interleaved in a regular hexagonal closed packed configuration such that every wire is adjacent to at least one cooling line and at least one wire of opposite polarity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.