Optical alignment based on spectrally-controlled interferometry
US10422700B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 23, 2018 |
| Grant date | Sep 24, 2019 |
| Priority date | — |
| Expiry date | Apr 23, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2009/0253
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In order to align the various components of an instrument, the beam produced by a spectrally-controlled light source is aligned with the optical axis of the instrument and the first component is placed at its predetermined position along the optical axis. Then, configuring the spectral modulation of the source such that one surface of the component is used as the reference surface, the spectrum of the source is modulated so as to produce a correlogram formed by reflections from the reference surface and from the other surface of the optical component. The correct alignment of the component is determined by adjusting its position so as to cause the correlogram to conform to the bullseye configuration that meets predetermined design parameters. The procedure is repeated with each other component of the instrument, the alignment of each component being based on interference fringes created independently of other components.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.