Interferometer and imaging method therefor
US10422744B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 3, 2017 |
| Grant date | Sep 24, 2019 |
| Priority date | — |
| Expiry date | Oct 3, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/1787
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is an interferometer for inspecting a test sample. The interferometer includes: a light source for providing a light beam; a beam splitting element, splitting the light beam into first and second incident light, wherein the first incident light is reflected by the test sample into first reflection light; a reflecting element, reflecting the second incident light into second reflection light; an optical detection element, receiving the first and the second reflection light into an interference signal; and a signal processing module, coupled to the optical detection element, for performing spatial differential calculation on the interference signal to generate a demodulation image of the test sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.