Suspended grid structures for electrodes in vacuum electronics
US10424455B2 · kind B2 · utility
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23References
10Claims
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Assignee
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Key dates
| Filing date | Jul 20, 2018 |
| Grant date | Sep 24, 2019 |
| Priority date | — |
| Expiry date | Jul 20, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2209/012
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Disclosed embodiments include vacuum electronics devices and methods of fabricating a vacuum electronics device. In a non-limiting embodiment, a vacuum electronics device includes: an electrode; a first film layer disposed on the electrode about a periphery of the electrode; and a second film layer disposed on the first film layer, the second film layer including a plurality of electrically conductive grid lines patterned therein that are supported only at the periphery of the electrode by the first film layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.