Elastic wave device
US10425058B2 · kind B2 · utility
0Cited by
3References
18Claims
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Assignee
Inventors
Key dates
| Filing date | Aug 23, 2016 |
| Grant date | Sep 24, 2019 |
| Priority date | — |
| Expiry date | Dec 2, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/14541
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An elastic wave device includes a piezoelectric substrate, a first dielectric film disposed on the piezoelectric substrate, and an IDT electrode laminated on the first dielectric film. The resistivity of the piezoelectric substrate is equal to or lower than the resistivity of the first dielectric film. The resistivity of the first dielectric film is equal to or lower than about 1×1014 Ω·cm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.