Model creation method and device, and inspection device using the same
US10429357B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 16, 2013 |
| Grant date | Oct 1, 2019 |
| Priority date | — |
| Expiry date | Aug 6, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F2111/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is provided an analysis model creation method which is capable of simply and quickly creating an accurate analysis model with respect to a structure including a crystalline material. In order to solve a problem described above, there is provided a model creation method of an analysis region used in numeral analysis, the method including a step of designating a crystal growth direction if a region is a region including crystallinity including acoustic anisotropy in the analysis region, a step of selecting partial image data to which the crystallinity of the region is reflected, a step of rotating and operating the partial image data along the crystal growth direction, and a step of creating image data which is covered in the region designated using the rotated partial image data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.