Contactless measurement of the conductivity of semiconductors using a multicarrier frequency test signal

US10429435B2 · kind B2 · utility

Assignees

• CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE · FR
• UNIVERSITÉ PARIS-SUD · DE
• Ecole Superieure D'Electricite · FR

Inventors

• Denis Mencaraglia · Les Ulis, FR
• Yann Le Bihan · Saint-Avé, FR
• Florent Loete · Massy, FR

Key dates

• Filing date: Apr 7, 2016
• Grant date: Oct 1, 2019
• Expiry date: Apr 7, 2036

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L22/14
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Method of contactless measurement of the conductivity of semiconductors, said method being implemented by: a first assembly comprising a signal emission/reception system —a second assembly comprising at least one semi-conducting target and an inductor element, —a third assembly, said method comprising at least the following steps: a) the first assembly emits a multifrequency signal, b) the second assembly reflects or transmits at least one part of the multifrequency signal emitted, c) the first assembly receives the reflected multifrequency signal reflected by the second assembly, d) the third assembly calculates the coefficient of reflection or of transmission of the emitted signal, e) the third assembly provides the conductivity of the semiconducting target.