Optical element comprising a reflective coating

US10429549B2 · kind B2 · utility

Assignees

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE
• Friedrich-Schiller-Universitat Jena · DE

Inventors

• Mark Schürmann · Jena, DE
• Stefan Schwinde · Jena, DE
• Norbert Kaiser · Markt Taschendorf, DE

Key dates

• Filing date: Jun 12, 2015
• Grant date: Oct 1, 2019
• Expiry date: Jun 12, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B27/142
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical element including a reflective coating is disclosed. In an embodiment the reflective coating includes an adhesion-promoting layer, an at least partially reflective silver layer disposed on the adhesion-promoting layer and a protective layer system disposed on the silver layer, wherein the protective layer system includes a plurality of dielectric layers, wherein the dielectric layers include at least one first layer and at least one second layer, wherein the first layer and the second layer have a different resistance to at least two different contamination substances, wherein the dielectric layers have a thickness of not more than 30 nm, and wherein a number of the dielectric layers amounts to at least five.