Thermal driven MEMS tunable filter
US10429634B2 · kind B2 · utility
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5References
15Claims
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Key dates
| Filing date | Dec 4, 2017 |
| Grant date | Oct 1, 2019 |
| Priority date | — |
| Expiry date | Dec 4, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/2938
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A microelectrical mechanical system (MEMS) implementation of tunable Fabry Perot filter devices is disclosed. The advantages associated with the use of these tunable etalons include increases in aperture size, displacement, reliability, and a reduction in cost. In some examples, integrated tunable detectors in miniature spectrometers using a thermal driven MEMS Fabry-Perot tunable filter are provided. Other examples use integrated thermal driven tunable MEMS Fabry-Perot filter to select fiber optical communication channel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.