Thin-film transistor structure with three-dimensional fin-shape channel and preparation method thereof
US10431688B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jul 30, 2016 |
| Grant date | Oct 1, 2019 |
| Priority date | — |
| Expiry date | Jul 30, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F77/206
Abstract
The present invention discloses a thin-film transistor structure with a three-dimensional fin-shape channel and a preparation method thereof. The preparation method includes following steps: (a) depositing and etching a bottom gate electrode on a substrate; (b) depositing a bottom dielectric layer at an upper part of a structure obtained from the step (a), and sequentially depositing a semiconductor film on the bottom dielectric layer; (c) etching the semiconductor film to obtain a fin-type channel; (d) respectively depositing an ohmic contact layer, a source electrode and a drain electrode on the semiconductor film located at both sides of the fin-shape channel, and etching; (e) depositing a top dielectric layer and a top gate electrode at an upper part of a structure obtained from the step (d); and (f) etching the top gate electrode, an completing a preparation of a thin-film transistor with a dual-gate three-dimensional fin-shape channel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.