Calibration of an RF processing system
US10433376B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 21, 2014 |
| Grant date | Oct 1, 2019 |
| Priority date | — |
| Expiry date | Aug 13, 2036 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02B40/00
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Apparatuses and methods are provided for processing an object in a cavity. The apparatuses include at least one radio frequency (RF) energy supply component configured to supply RF energy for application to one or more radiating elements configured to emit RF radiation in response to the applied RF energy. In some embodiments, a provided apparatus also includes a memory storing a set of coefficients associated with the RF energy supply component; and a processor configured to receive feedback in response to emission of RF radiation by the one or more radiating elements and control application of RF energy to one or more of the radiating elements based on the feedback and the set of coefficients.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.