Fluorinated and hydrogenated diamond-like carbon materials for anti-reflective coatings
US10435567B2 · kind B2 · utility
Inventors
Key dates
| Filing date | Feb 12, 2015 |
| Grant date | Oct 8, 2019 |
| Priority date | — |
| Expiry date | Feb 12, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3467
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Fluorinated and hydrogenated diamond-like carbon (“DLC-FH”) that have unique optical properties differ as a class from the existing DLC art, whose refractive indices [η]are limited to rather high values above a lower threshold of 1.7, and can range up to about 2.7. The DLC-FH materials can achieve very low refractive indices at 550 nm wavelength, [η550], i.e., below 1.5, and especially demonstrated down to 1.3. Moreover, whereas the absorption for the existing DLC art, as quantified by the extinction coefficient [κ] at a wavelength of 550 nm, [κ550] is limited to about 0.04, our DLC-FH material can achieve [κ550] below 0.01. Both of these attributes, i.e., low [η550] and low [κ550] means that, for the first time, a carbon-based material as represented by the DLC-FH material, can be used for anti-reflection (AR) coating, wherein there are no longer any restrictions in how they can be used to promote low reflectance (with low fit[η]) and high transmittance (with low [κ]). A dual-energy deposition process, using a Laser Arc for the high energy component creates a plasma of energized carbon atoms and ions, and excites a down-stream flow of fluorine and hydrogen containing gases to depo…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.