Patent · US Active

Photo-acoustic device and method for non-contact measurement of thin layers

US10436754B2 · kind B2 · utility

0Cited by

11References

20Claims

0Family size

Assignee

Novelis Inc. · US

Inventors

Heinrich Prinzhorn · Göttingen, DE
Stefan Erdmann · Atlanta, US
Thomas Wuttke · Renshausen, DE
Andreas Bauer · Obernburg, DE
Bernd Abel · Dransfeld, DE
Ales Charvat · Oebisfelde, DE

Key dates

Filing date	Sep 13, 2017
Grant date	Oct 8, 2019
Priority date	—
Expiry date	Feb 14, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG01N2291/103
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A measuring device for non-mechanical-contact measurement of a layer, the measuring device including a light source operative to generate a pulse adapted to interact with the layer so as to generate a thermal wave in a gas medium present adjacent the layer. The thermal wave causes an acoustic signal to be generated. The measuring device further includes a detector adapted to detect a first signal responsive to the acoustic signal, the detector not being in mechanical contact with the layer. The first signal is representative of the measured layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.