Micro electro mechanical system and layered hinge for use in MEMS micromirror having first and second serpentine shapes
US10437046B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 4, 2016 |
| Grant date | Oct 8, 2019 |
| Priority date | — |
| Expiry date | Nov 5, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/105
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Two-axis MEMS Micromirror is disclosed featuring combs drive actuation with independent drive for each of two axes of rotation and a layered hinge design providing an improved shock and vibration performance. The two-axis MEMS Micromirror is fabricated using Double SOI wafer as the primary starting material. In addition, actuation voltages are driven to an inner axis through multiple layers in one or more outer hinges, allowing for a robust and reliable micromirror that is easy to drive with multiple DC voltages, and moderately insensitive to temperature, shock and vibration. Furthermore, this novel design achieves set angles that are highly stable over time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.