Patent · US Active

Method of detaching a pellicle from a photomask

US10437145B2 · kind B2 · utility

4Cited by
15References
4Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 9, 2018
Grant dateOct 8, 2019
Priority date—
Expiry dateMar 2, 2038

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F1/64
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A pellicle includes a pellicle frame, a pellicle membrane, and an attaching element, a first surface of the attaching element having exposed pores.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.