System and method for improving the accuracy of a rate of decay measurement for real time correction in a mass flow controller or mass flow meter by using a thermal model to minimize thermally induced error in the rod measurement
US10437264B2 · kind B2 · utility
1Cited by
5References
20Claims
0Family size
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Key dates
| Filing date | Mar 4, 2013 |
| Grant date | Oct 8, 2019 |
| Priority date | — |
| Expiry date | Jul 29, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7722
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The disclosed embodiments include a method, apparatus, and computer program product for improving the accuracy of a rate of decay measurement for real time correction in a mass flow controller or mass flow meter by using a thermal model to minimize thermally induced error in the rate of decay measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.