Optical verification system and methods of verifying micro device transfer
US10438339B1 · kind B1 · utility
9Cited by
5References
21Claims
0Family size
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Key dates
| Filing date | Sep 5, 2017 |
| Grant date | Oct 8, 2019 |
| Priority date | — |
| Expiry date | Nov 3, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
An optical verification method and mass transfer system described. In an embodiments, a mass transfer sequence may be accompanied by optical imaging and inspection to detect pick and place errors. The optical imaging and inspection techniques may be performed in-situ.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.