Electric connection flexures
US10442680B2 · kind B2 · utility
1Cited by
2References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 14, 2016 |
| Grant date | Oct 15, 2019 |
| Priority date | — |
| Expiry date | Aug 7, 2037 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/053
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Electric connection flexures for moving stages of microelectromechanical systems (MEMS) devices are disclosed. The disclosed flexures may provide an electrical and mechanical connection between a fixed frame and a moving frame, and are flexible in the moving frame's plane of motion. In implementations, the flexures are formed using a process that embeds the two ends of each flexure in the fixed frame and moving frame, respectively.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.