Production of polycrystalline silicon by the thermal decomposition of silane in a fluidized bed reactor
US10442694B2 · kind B2 · utility
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36Claims
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Key dates
| Filing date | Jul 15, 2015 |
| Grant date | Oct 15, 2019 |
| Priority date | — |
| Expiry date | May 19, 2036 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B33/03
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Processes for producing polycrystalline silicon by thermal decomposition of silane are disclosed. The processes generally involve thermal decomposition of silane in a fluidized bed reactor operated at reaction conditions that result in a high rate of productivity relative to conventional production processes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.