Capacitive force sensor having improved attachment

US10444087B2 · kind B2 · utility

Assignee

• Preh GmbH · DE

Inventors

• Benedikt Schmidt · Winterberg, DE
• Thomas Zirkelbach · Tamm, DE
• Harald Ment · Mittelstreu, DE
• Jürgen Nauth · Burkardroth, DE
• Thilo Schultheis · Bad Neustadt an der Saale, DE
• Sara Hofmann · Friedberg, DE
• Matthias Müller · Kirchheim unter Teck, DE

Key dates

• Filing date: Jan 8, 2018
• Grant date: Oct 15, 2019
• Expiry date: Jan 8, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L1/142
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The present disclosure relates to a capacitive force sensor. The capacitive force sensor includes a planar base body, a supported membrane body, two spacers disposed spaced apart to each other, where the membrane body abuts the planar base body via the spacers, and wherein a cavity is formed between the membrane body and the planar base body to allow displacement or deflection of the membrane body under a force onto the membrane body in the area between the spacers. The membrane body forms a first electrode and, a second electrode is provided on the planar base body, wherein the first and second electrode define a first precision capacitor with changing measuring capacity depending on the force. An electrical bracket extends from each of the spacers for electrically contacting the first electrode and forms a bend between each of the associated spacer and a bottom of the base body.