Microengineered skimmer cone for a miniature mass spectrometer
US10446382B2 · kind B2 · utility
1Cited by
7References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 13, 2016 |
| Grant date | Oct 15, 2019 |
| Priority date | — |
| Expiry date | Sep 25, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/0018
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for forming a miniature skimmer cone for a free jet expansion vacuum interface is disclosed. The skimmer cone is formed from electroplated metal, deposited inside a blind hole formed on a silicon substrate. The substrate is partially removed to expose the skimmer cone, together with other features formed by etching, and an outlet orifice is formed. A complete miniature vacuum interface is formed from the stacked assembly of a part containing an inlet orifice, a spacer, and the part containing a skimmer cone described above, mounted in an intermediate pressure chamber at the inlet to a mass spectrometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.