Conveyance system and conveyance method
US10446427B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 13, 2016 |
| Grant date | Oct 15, 2019 |
| Priority date | — |
| Expiry date | Oct 13, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67769
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A conveyance system includes a track, ceiling conveyance vehicles, and a conveyance controller configured or programmed to output a conveyance instruction for a FOUP to the ceiling conveyance vehicles. When a first FOUP on a downstream port is waiting for collection, the conveyance controller waits without outputting a conveyance instruction instructing collection of the first FOUP until any of the conveyance vehicles conveying a second FOUP to an upstream port has been recognized until a waiting time set in advance has elapsed since the first FOUP changed to a state waiting for collection and outputs the conveyance instruction instructing collection of the first FOUP when the waiting time has elapsed since a point in time when the first FOUP changed to the state waiting for collection.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.