Microstructure enhanced absorption photosensitive devices
US10446700B2 · kind B2 · utility
16Cited by
46References
40Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 30, 2017 |
| Grant date | Oct 15, 2019 |
| Priority date | — |
| Expiry date | Oct 30, 2037 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/547
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
Microstructure enhanced photodiodes and avalanche photodiodes are monolithically integrated with CMOS/BiCMOS circuitry such as transimpedance amplifiers. Microstructures, such as holes, can improve quantum efficiency in silicon and III-V materials and can also reduce avalanche voltages for avalanche photodiodes. Applications include optical communications within and between datacenters, telecommunications, LIDAR, and free space data communication.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.