Membrane hydrophone for high frequency ultrasound and method of manufacture
US10451476B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 18, 2016 |
| Grant date | Oct 22, 2019 |
| Priority date | — |
| Expiry date | Dec 23, 2037 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61B8/58
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A membrane hydrophone for analyzing high frequency ultrasound transducers has a piezoelectric membrane with electrode patterns created on the surface of the membrane. In one embodiment, the electrode patterns are doubled on each side of the membrane except for an active area of the hydrophone. In one embodiment, the electrodes are formed by removing a conductive coating on the membrane with laser pulses. The laser is set to remove the conductive coating from the piezoelectric membrane from the same side of the membrane in order to accurately align the electrodes in the active area. In one embodiment, the active area of the hydrophone has an area in a range of 900-10,000 square microns.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.