Method for manufacturing active matrix array device, and active matrix array device manufactured thereby
US10451943B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 20, 2016 |
| Grant date | Oct 22, 2019 |
| Priority date | — |
| Expiry date | Apr 20, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/13613
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Active matrix array devices are constituted by devices that have a function such as those of a display/light emitting device, a sensor, a memory or an actuator, and are arranged in a matrix array shape, and the expansion of usage in various fields and applications is expected. However, there is little similarity and compatibility in the forming process and materials between a device such as a display/light emitting device, a sensor, a memory, or an actuator, and a circuit portion that controls such a device in the matrix element, and therefore the device and the circuit portion are mutually restricting factors. This results in an increase in the manufacturing cost and limitation of the function.A conventional active matrix array device is manufactured by performing various process steps on the same substrate. Control circuit portions each including a transistor are formed in some of the process steps. In contrast, the problem described above is solved by forming the control circuit portions of an active matrix array device on a substrate different from that of other portions, and the control circuit portions are respectively mounted on matrix elements in a middle step of the manufa…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.