Optical chip ID definition using nanoimprint lithography
US10453800B1 · kind B1 · utility
1Cited by
6References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 29, 2018 |
| Grant date | Oct 22, 2019 |
| Priority date | — |
| Expiry date | Mar 29, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2223/54473
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An optically readable chip ID is provided to an imprintable material that is formed as a last level of an integrated circuit (IC) chip using nanoimprint lithography. The nanoimprint lithography process provides an array of indentations into the imprintable material that is typically arranged in a hexadecimal pattern. The hexadecimal pattern includes one or more optically readable characters which combine to encode chip location identification data. The chip location identification data identifies a unique location of the product chip on a wafer prior to dicing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.