Process for the manufacture of solar cells

US10453986B2 · kind B2 · utility

Assignee

• SOLVAY FLUOR GMBH · DE

Inventor

• Marcello Riva · Hannover, DE

Key dates

• Filing date: Apr 28, 2008
• Grant date: Oct 22, 2019
• Expiry date: Sep 21, 2029

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P70/50

Abstract

Solar cells are manufactured from P-type doped monocrystalline or polycrystalline silicon ingots by sawing wafers and applying an N-type doping. The wafers can be improved by etching them, especially in a plasma assisted process, with fluorine, carbonyl fluoride, SF6 or NF3. Hereby, the surface is roughened so that the degree of light reflection is reduced, cracks caused from the sawing operation are prevented from proliferation, and glass-like phosphorus-containing oxide coatings caused by phosphorus doping are removed.