Phase-change material (PCM) radio frequency (RF) switches with stressor layers and contact adhesion layers

US10454027B1 · kind B1 · utility

Assignee

• Newport Fab, LLC · US

Inventors

• David J. Howard · Irvine, US
• Jefferson E. Rose · Hawthorne, US
• Gregory P. Slovin · Irvine, US
• Nabil El-Hinnawy · Irvine, US

Key dates

• Filing date: Feb 5, 2019
• Grant date: Oct 22, 2019
• Expiry date: Feb 5, 2039

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N70/8828

Abstract

A radio frequency (RF) switch includes a stressed phase-change material (PCM) and a heating element underlying an active segment of the stressed PCM and extending outward and transverse to the stressed PCM. In one approach, at least one transition layer is situated over the stressed PCM. An encapsulation layer is situated over the at least one transition layer and on first and second sides of the stressed PCM. A stressor layer is situated over the encapsulation layer and the said stressed PCM. Alternatively or additionally, contacts of the RF switch extend into passive segments of a PCM, wherein adhesion layers adhere the passive segments of the PCM to the contacts.