Ion throughput pump and method
US10455683B2 · kind B2 · utility
1Cited by
7References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 31, 2016 |
| Grant date | Oct 22, 2019 |
| Priority date | — |
| Expiry date | May 31, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J27/143
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An ion throughput pump (ITP) includes a pump inlet configured to communicate with a vacuum chamber; an ionization source fluidly communicating with the vacuum chamber via the pump inlet and configured for ionizing gas species received from the vacuum chamber; a pump outlet; ion optics configured for accelerating ions produced by the ionization source toward the pump outlet; and a roughing pump stage configured for receiving the ions from the ionization source, producing neutral species from the ions, and pumping the neutral species through the pump outlet.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.