Patent · US Active

Niobium titanium nitride thin film coatings for far-infared absorption and filtering

US10458853B2 · kind B2 · utility

0Cited by

1References

6Claims

0Family size

Assignee

United States of America as represented by the Administrator of NASA · US

Inventors

Ari D. Brown · Ellicott City, US
Edward J. Wollack · Glenn Dale, US
Kevin H. Miller · Washington, US

Key dates

Filing date	Sep 15, 2017
Grant date	Oct 29, 2019
Priority date	—
Expiry date	Sep 26, 2037

Classification

Technology area (CPC G)Physics
CPC primaryG01N2021/3595
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The disclosed subject matter relates to an infrared detector including a dielectric detector membrane and a NbTiN absorber coating disposed thereon, the latter being a low stress, high resistivity film or coating useful at extremely low temperatures.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.