Pressure difference sensor for providing a pressure measurement signal
US10458874B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 18, 2017 |
| Grant date | Oct 29, 2019 |
| Priority date | — |
| Expiry date | Nov 6, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0618
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure difference sensor for providing a pressure measurement signal, comprising: a pressure difference measuring cell, which is suppliable with first and second pressures and which outputs the pressure measurement signal; first and second ceramic stiffening elements, each of which is joined with the pressure difference measuring cell and has a duct, via which the first, respectively the second, pressure is suppliable to the pressure difference measuring cell; a platform with first and second pressure input openings, each of which extends from a first surface to a second surface of the platform, wherein the pressure input openings are sealed on the first surface, each with its own isolating diaphragm, and first and second pressures tubes, which are arranged between the stiffening elements and the platform, and wherein each of the first pressure tube and the second pressure tube has at least one bend in a region between the platform and a first, respectively second, connecting area of the corresponding pressure tube.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.