Element provided with portion for position determination and measuring method
US10458882B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 31, 2017 |
| Grant date | Oct 29, 2019 |
| Priority date | — |
| Expiry date | May 17, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30204
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for measuring a position of a target surface provided with portions for position determination thereon, wherein a diffuse reflectance of the target surface is 0.1% or less, and a diffuse reflectance of the portions for position determination is 5% or more, and wherein the target surface is configured such that a tangential plane at any point on the target surface where each of the portions for position determination is installed forms an arbitrary angle between 15 degrees and 75 degrees inclusive with a certain direction, the method including the steps of illuminating the target surface with parallel light in the certain direction; determining positions of border lines of the plural portions for position determination from an image of the target surface; and determining the position of the target surface from the positions of the border lines of the plural portions for position determination.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.