Method for correcting an angular deviation in the operation of a coordinate measuring machine

US10466029B2 · kind B2 · utility

Assignee

• Carl Zeiss Industrielle Messtechnik GmbH · DE

Inventors

• Andreas Fuchs · Aalen, DE
• Tobias Held · Nördlingen, DE
• Rainer Sagemueller · Aalen, DE
• Dominik Seitz · Schwäbisch Gmünd, DE

Key dates

• Filing date: Mar 13, 2014
• Grant date: Nov 5, 2019
• Expiry date: Oct 13, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B21/045
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for correcting an angular deviation between a real angle and an ideal angle between motion axes of a coordinate measuring device. The angular deviation depends on position, temperature, and/or loading mass. Values of a position-dependent angular deviation for partial measurement ranges of the coordinate measuring device are determined, and/or a difference between the angular deviation in a partial measurement range and a total measurement range, and the position-dependent angular deviation is corrected by using these values. Values of the temperature-dependent angular deviation for at least two different temperatures are determined and the deviation is corrected based on these. Values of the loading-mass-dependent angular deviation for loading the coordinate measuring device with at least two different loading masses are determined in a range of loading masses and/or information is obtained for correcting the loading-mass-dependent angular deviation in a temperature range and the deviation is corrected by using one of the values or information.