Patent · US Active

Method of fabrication for single crystal piezoelectric RF resonators and filters

US10466572B2 · kind B2 · utility

4Cited by
1References
38Claims
0Family size

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Key dates

Filing dateAug 17, 2017
Grant dateNov 5, 2019
Priority date—
Expiry dateJun 8, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH04B2210/006
  • WIPO fieldBasic communication processes
  • WIPO sectorElectrical engineering

Abstract

1. A method of fabricating an RF filter comprising an array of resonators comprising the steps of:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.