Patent · US Active

Heterojunction bipolar transistor and method of manufacturing the same

US10468508B2 · kind B2 · utility

1Cited by
4References
24Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 17, 2019
Grant dateNov 5, 2019
Priority date
Expiry dateJan 17, 2039

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/133
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A bipolar transistor is supported by a single-crystal silicon substrate including a collector contact region. A first epitaxial region forms a collector region of a first conductivity type on the collector contact region. A second epitaxial region forms a base region of a second conductivity type. Deposited semiconductor material forms an emitter region of the first conductivity type. The collector region, base region and emitter region are located within an opening formed in a stack of insulating layers that includes a sacrificial layer. The sacrificial layer is selectively removed to expose a side wall of the base region. Epitaxial growth from the exposed sidewall forms a base contact region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.