Measuring the position of objects in space
US10473451B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 5, 2018 |
| Grant date | Nov 12, 2019 |
| Priority date | — |
| Expiry date | Aug 5, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01S17/88
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Interference fringes in a bullseye pattern are produced by a measurement module by interfering a flat reference beam with a spherical beam reflected by a sphere connected to the tip of a probe in point contact with a test object. The bullseye interferogram is registered at a detector and analyzed conventionally to produce a position measurement of the tip of the probe. A beam correction module is used to align the bullseye interferogram with the illumination axis of the measurement module. By combining at least three such measurement modules in a coordinate measurement machine, the three-dimensional position of the probe and of its point contact with the test object can be obtained from analysis of the bullseye interferograms registered by the detectors with high precision and greatly reduced Abbe error.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.