Sensor and sensor package
US10473685B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2017 |
| Grant date | Nov 12, 2019 |
| Priority date | — |
| Expiry date | Mar 2, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0828
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
According to one embodiment, a sensor includes a first support portion, a first movable portion, a first piezoelectric element, and a first magnetic element. The first movable portion extends in a first extension direction and is connected to the first support portion. The first piezoelectric element is fixed to the first movable portion. The first piezoelectric element includes a first electrode, a second electrode provided between the first electrode and the first movable portion, and a first piezoelectric layer provided between the first electrode and the second electrode. The first magnetic element is fixed to the first movable portion. The first magnetic element includes a first magnetic layer, a second magnetic layer, and a first intermediate layer provided between the first magnetic layer and the second magnetic layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.