Method and apparatus for infrared scanning near-field optical microscopy based on photothermal effect
US10473693B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 9, 2018 |
| Grant date | Nov 12, 2019 |
| Priority date | — |
| Expiry date | Mar 9, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/22
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods may be provided for measuring an infrared absorption of a sub micrometer region of a sample. An Infrared light source may illuminate a sample in a region that is interacting with the tip of a Scanning Probe Microscope (SPM), stimulating the sample in a way that produces measurable optical properties related to Infrared absorption of the sample region. A probe light source is directed at the region of the sample and SPM tip, and probe light emanating from the tip and sample region is collected. The collected light may be used to derive infrared absorption spectrum information of the sample region, possibly on a sub-micron scale.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.