Fine structure, optical member, antireflection film, water-repellent film, substrate for mass spectrometry, phase plate, process for producing fine structure, and process for producing antireflection film
US10473823B2 · kind B2 · utility
2Cited by
12References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 3, 2013 |
| Grant date | Nov 12, 2019 |
| Priority date | — |
| Expiry date | May 19, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24355
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Provided are an antireflection film having a high antireflection effect and a production process therefor, an optical member excellent in antireflection effect, a water-repellent film having excellent water repellency, a substrate for mass spectrometry having high detection sensitivity, a high-accuracy phase plate, and a fine structure that can be used in the foregoing and a production process therefor. The fine structure is a structure, including multiple conical portions on a surface thereof, in which the conical portions have a mesostructure; and the mesostructure includes a structure having mesopores.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.