Integrated MEMS switches for selectively coupling light in and out of a waveguide
US10473862B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 16, 2017 |
| Grant date | Nov 12, 2019 |
| Priority date | — |
| Expiry date | Dec 16, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12145
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A steerable optical transmit and receive terminal includes a MEMS-based N×1 optical switch network. Each optical switch in the optical switch network uses an electrostatic MEMS structure to selectively position a translatable optical grating close to or far from an optical waveguide. In the close (“ON”) position, light couples between the translatable optical grating and the optical waveguide, whereas in the far (“OFF”) position, no appreciable light couples between the translatable optical grating and the optical waveguide. The translatable optical grating is disposed at or near a surface of the optical switch network. Thus, the translatable optical grating emits light into, or receives light from, free space. The steerable optical transmit and receive terminal also includes a lens and can steer a free space optical beam in a direction determined by which port of the N×1 optical switch network is ON.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.