Movable reflection device and reflection surface drive system utilizing same
US10473917B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 7, 2016 |
| Grant date | Nov 12, 2019 |
| Priority date | — |
| Expiry date | Jan 4, 2037 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/056
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A mirror with a reflective layer formed thereon is supported within a frame-shaped support by two U-shaped arms. A plate-like arm connects fixation points (Q1, Q2), and a plate-like arm connects fixation points (Q3, Q4). A pair of piezoelectric elements (E11, E12) disposed along a longitudinal axis (L1) on an upper surface of an outside bridge of the arm, and a single piezoelectric element (E20) disposed along the longitudinal axis (L2) on the upper surface of an inside bridge. Similarly, a pair of piezoelectric elements (E31, E32) disposed on an upper surface of an outside bridge of the arm, and a single piezoelectric element (E40) disposed on the upper surface of an inside bridge. When a positive drive signal is applied to the piezoelectric elements (E11, E20, E31, E40) and a negative drive signal is applied to the piezoelectric elements (E12, E32), the mirror is displaced efficiently.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.